IMPROVED RESOLUTION USING THE RING-SHAPED SOURCES

被引：3

作者：

ASAI, S ^{[1
]}

HANYU, I ^{[1
]}

HIKOSAKA, K ^{[1
]}

机构：

[1] FUJITSU LABS LTD,10-1 MORINOSATO WAKAMIYA,ATSUGI 24301,JAPAN

来源：

MICROELECTRONIC ENGINEERING | 1992年 / 17卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(92)90022-J

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes simulated results of light amplitude and phase of a mask-projected image from a point source. It discusses the dependence on the point source location on a plane perpendicular to the optical axis. We showed that a projected image illuminated by point sources far from the optical axis was improved by the effect of interference between multiple apertures. Resolution of 0.275-mu-m lines and spaces was improved experimentally at a wavelength of 365 nm and a numerical aperture of 0.54.

引用

页码：109 / 112

页数：4