Integrated microwave power sensor

被引：61

作者：

Dehe, A

Krozer, V

Fricke, K

Klingbeil, H

Beilenhoff, K

Hartnagel, HL

机构：

[1] Technische Hochschule Darmstadt, Institut für Hochfrequenztechnik, D-64283 Darmstadt

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 25期

关键词：

MMIC; sensors; microwave devices;

D O I：

10.1049/el:19951506

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new MMIC compatible sensor that measures RF power transmitted over a 50 Omega coplanar waveguide is presented. ?he sensor is based on the thermoelectric effect in AlGaAs [1] and GaAs/AlGaAs micromachining technology is used for realisation. A sensitivity of 1.1V/W has been achieved with a reflection coefficient of 0.1 at 10GHz, by a first realisation.

引用

页码：2187 / 2188

页数：2