NEW CONDITIONS FOR SYNTHESIZING SOI STRUCTURES BY HIGH-DOSE OXYGEN IMPLANTATION

被引：56

作者：

STOEMENOS, J ^{[1
]}

JAUSSAUD, C ^{[1
]}

BRUEL, M ^{[1
]}

MARGAIL, J ^{[1
]}

机构：

[1] CEN,ELECTR & TECHNOL INFORMAT LAB,F-38041 GRENOBLE,FRANCE

来源：

JOURNAL OF CRYSTAL GROWTH | 1985年 / 73卷 / 03期

关键词：

D O I：

10.1016/0022-0248(85)90020-X

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：546 / 550

页数：5

共 11 条

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