THE ROLE OF HYDROGEN IN THE RADICAL POLYMERIZATION MECHANISM OF HYDROCARBONS AND CHLOROSILANES IN A LOW-PRESSURE MICROWAVE PLASMA

被引：13

作者：

AVNI, R

CARMI, U

INSPEKTOR, A

ROSENTHAL, I

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 04期

关键词：

D O I：

10.1116/1.573385

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1813 / 1820

页数：8

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[9]

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