A STUDY OF THE COMPOSITION OF IN2O3(TE) FILMS PREPARED BY THE SPRAYING METHOD

被引：12

作者：

RATCHEVA, T ^{[1
]}

NANOVA, M ^{[1
]}

KINOVA, L ^{[1
]}

PENEV, I ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST NUCL RES & NUCL ENERGY,BU-1113 SOFIA,BULGARIA

来源：

THIN SOLID FILMS | 1991年 / 202卷 / 02期

关键词：

D O I：

10.1016/0040-6090(91)90095-F

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we report investigations on the composition of In2O3 films doped with tellurium, prepared by the spraying method. The aim of this investigation was to establish the optimum conditions for the preparation of highly transparent and conductive films. The film composition was studied by X-ray photoelectron spectroscopy and by instrumental neutron activation analysis. The analysis data allow us to deduce a transition coefficient (1.79 +/- 0.18) relating the In:Te ratio of the solution to that of the film.

引用

页码：243 / 247

页数：5

共 8 条

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