ANALYSIS OF MEASUREMENT ACCURACY IN SINUSOIDAL PHASE MODULATING INTERFEROMETRY

被引:62
作者
SASAKI, O
OKAZAKI, H
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D O I
10.1364/AO.25.003152
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:3152 / 3158
页数:7
相关论文
共 3 条
[1]   DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].
BRUNING, JH ;
HERRIOTT, DR ;
GALLAGHER, JE ;
ROSENFELD, DP ;
WHITE, AD ;
BRANGACCIO, DJ .
APPLIED OPTICS, 1974, 13 (11) :2693-2703
[2]  
CRANE R, 1969, APPL OPTICS, V8, P538
[3]   SINUSOIDAL PHASE MODULATING INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT [J].
SASAKI, O ;
OKAZAKI, H .
APPLIED OPTICS, 1986, 25 (18) :3137-3140