GROWTH OF HYDROGENATED AMORPHOUS-SILICON DUE TO CONTROLLED ION-BOMBARDMENT FROM A PURE SILANE PLASMA

被引：79

作者：

DREVILLON, B

PERRIN, J

SIEFERT, JM

HUC, J

LLORET, A

DEROSNY, G

SCHMITT, JPM

机构：

来源：

APPLIED PHYSICS LETTERS | 1983年 / 42卷 / 09期

关键词：

D O I：

10.1063/1.94100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：801 / 803

页数：3

共 13 条

[1] SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE [J].

DREVILLON, B ;

HUC, J ;

LLORET, A ;

PERRIN, J ;

DEROSNY, G ;

SCHMITT, JPM .

APPLIED PHYSICS LETTERS, 1980, 37 (07) :646-648

[2] FAST POLARIZATION MODULATED ELLIPSOMETER USING A MICROPROCESSOR SYSTEM FOR DIGITAL FOURIER-ANALYSIS [J].

DREVILLON, B ;

PERRIN, J ;

MARBOT, R ;

VIOLET, A ;

DALBY, JL .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1982, 53 (07) :969-977

[3] OPTICAL-SPECTRA OF GLOW-DISCHARGE-DEPOSITED SILICON [J].

EWALD, D ;

MILLEVILLE, M ;

WEISER, G .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1979, 40 (04) :291-303

[4] HETEROGENEITIES AND SURFACE EFFECTS IN GLOW-DISCHARGE DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS [J].

FRITZSCHE, H .

THIN SOLID FILMS, 1982, 90 (02) :119-129

[5] MICROSTRUCTURE OF PLASMA-DEPOSITED A-SI-H FILMS [J].

KNIGHTS, JC ;

LUJAN, RA .

APPLIED PHYSICS LETTERS, 1979, 35 (03) :244-246

[6] EFFECTS OF INERT-GAS DILUTION OF SILANE ON PLASMA-DEPOSITED A-SI-H FILMS [J].

KNIGHTS, JC ;

LUJAN, RA ;

ROSENBLUM, MP ;

STREET, RA ;

BIEGLESEN, DK ;

REIMER, JA .

APPLIED PHYSICS LETTERS, 1981, 38 (05) :331-333

[7] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS [J].

LUCOVSKY, G ;

NEMANICH, RJ ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1979, 19 (04) :2064-2073

[8] STRUCTURE MODIFICATION BY ION-BOMBARDMENT DURING DEPOSITION [J].

MATTOX, DM ;

KOMINIAK, GJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :528-&

[9] DISSOCIATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT [J].

PERRIN, J ;

SCHMITT, JPM ;

DEROSNY, G ;

DREVILLON, B ;

HUC, J ;

LLORET, A .

CHEMICAL PHYSICS, 1982, 73 (03) :383-394

[10]

PERRIN JC, UNPUB

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