AN ION-SCATTERING SPECTROSCOPY AND TEMPERATURE-PROGRAMMED DESORPTION STUDY OF THE INTERACTION OF N-2 WITH SI(111)

被引：6

作者：

CORALLO, CF

HOFLUND, GB

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574279

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：713 / 717

页数：5

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