共 12 条
SILVER ON DIAMOND SCHOTTKY DIODES FORMED ON BORON DOPED HOT-FILAMENT CHEMICAL VAPOR-DEPOSITED POLYCRYSTALLINE DIAMOND FILMS
被引:21
作者:
ZHAO, G
[1
]
STACY, T
[1
]
CHARLSON, EJ
[1
]
CHARLSON, EM
[1
]
CHAO, CH
[1
]
HAJSAID, M
[1
]
MEESE, J
[1
]
POPOVICI, G
[1
]
PRELAS, M
[1
]
机构:
[1] UNIV MISSOURI,DEPT NUCL ENGN,COLUMBIA,MO 65211
关键词:
D O I:
10.1063/1.107687
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
Schottky diodes were fabricated using sputter deposited silver contacts to boron doped polycrystalline diamond thin films grown by a hot-filament chemical vapor deposition process with trimethyl borate as an in situ dopant source. High forward current density and a high forward-to-reverse current ratio were exhibited by these diodes. Current density-voltage and capacitance-voltage-frequency characteristics of these diodes are very similar to those of Schottky diodes fabricated using a single-crystal diamond substrate.
引用
收藏
页码:1119 / 1121
页数:3
相关论文