ROTATING-DISK GAUGE FOR ABSOLUTE TOTAL PRESSURE MEASUREMENT IN HIGH-VACUUM

An absolute vacuum gauge exploiting molecular drag between coaxial discs, a configuration suggested by Langmuir, is being further investigated. The device operates in a range similar to that of the spinning rotor gauge. It consists of a silicon disc 92 mm in diameter suspended on a calibrated torsion fiber a few mm above a metal disc of the same size which rotates at speeds up to 50000 rpm. Molecules leaving this rotor communicate a torque to the suspended disc by molecular drag. The angular deflection thus produced is sensed optically and is about 2-degrees at 10(-6) mbar. The critical factors relevant to absolute measurement, such as tangential momentum accommodation, geometry, and edge effects have been investigated and experimental comparisons with a spinning rotor gauge demonstrate that absolute pressure measurements with uncertainty better than +/- 5% are possible at pressures approximately 10(-6) mbar. Measurements of similar uncertainty will be possible at 10(-7) mbar.