MONTE-CARLO APPROACH TO DIRECT SIMULATION OF ELECTRON PENETRATION IN SOLIDS

被引:156
作者
SHIMIZU, R
KATAOKA, Y
IKUTA, T
KOSHIKAWA, T
HASHIMOTO, H
机构
[1] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA,JAPAN
[2] OSAKA ELECT COMMUN UNIV,DEPT APPL ELECTR,NEYAGAWA,OSAKA,JAPAN
关键词
D O I
10.1088/0022-3727/9/1/017
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:101 / 114
页数:14
相关论文
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