AMORPHOUS HARD CARBON-FILMS ON POLYCARBONATE SUBSTRATES

被引:8
作者
NYAIESH, AR
HOLLAND, L
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D O I
10.1016/0042-207X(84)90370-1
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:523 / 526
页数:4
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共 6 条
[1]   OPTICAL-PROPERTIES OF HYDROGENATED HARD CARBON THIN-FILMS [J].
BUBENZER, A ;
DISCHLER, B ;
NYAIESH, A .
THIN SOLID FILMS, 1982, 91 (01) :81-87
[2]   DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1976, 38 (02) :L17-L19
[3]   INFRARED TRANSPARENT AND AMORPHOUS-CARBON GROWN UNDER ION IMPACT IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1978, 48 (03) :L21-L23
[4]  
HOLLAND L, 1976, Patent No. 1582231
[5]   MECHANICAL-PROPERTIES OF AND CRACKS AND WRINKLES IN VACUUM-DEPOSITED MGF2, CARBON AND BORON COATINGS [J].
KINBARA, A ;
BABA, S ;
MATUDA, N ;
TAKAMISAWA, K .
THIN SOLID FILMS, 1981, 84 (02) :205-212
[6]   THE GROWTH OF AMORPHOUS AND GRAPHITIC CARBON LAYERS UNDER ION-BOMBARDMENT IN AN RF PLASMA [J].
NYAIESH, AR ;
HOLLAND, L .
VACUUM, 1984, 34 (05) :519-522