ION-IMPLANTATION DURING FILM GROWTH AND ITS EFFECT ON SUPERCONDUCTING PROPERTIES OF NIOBIUM

被引：37

作者：

HEIM, G ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 09期

关键词：

D O I：

10.1063/1.322154

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4006 / 4012

页数：7

共 43 条

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