DEFECT CHARACTERIZATION AND DETECTION IN LANGMUIR-BLODGETT-FILMS

被引：26

作者：

LESIEUR, P

BARRAUD, A

VANDEVYVER, M

机构：

[1] CEN, Gif sur Yvette, Fr, CEN, Gif sur Yvette, Fr

来源：

THIN SOLID FILMS | 1987年 / 152卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(87)90414-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：155 / 164

页数：10

共 40 条

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[9] ELECTRON-IRRADIATION OF POLYMERIZABLE LANGMUIR-BLODGETT MULTILAYERS AS MODEL RESISTS FOR ELECTRON-BEAM LITHOGRAPHY [J].

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[10] ELECTROMIGRATION FAILURE IN FILAMENTS THROUGH LANGMUIR-BLODGETT-FILMS [J].

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