INTERNAL-STRESS OF THIN SILVER, COPPER, GOLD AND CHROMIUM FILMS - A COMPARISON

被引:18
作者
ABERMANN, R [1 ]
KOCH, R [1 ]
MARTINZ, HP [1 ]
机构
[1] UNIV INNSBRUCK, INST PHYS CHEM, A-6020 INNSBRUCK, AUSTRIA
关键词
D O I
10.1016/0042-207X(83)90643-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:871 / 873
页数:3
相关论文
共 2 条
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ABERMANN, R ;
KRAMER, R ;
MASER, J .
THIN SOLID FILMS, 1978, 52 (02) :215-229
[2]   THE INFLUENCE OF O-2,H-2,H2O,N-2,CO AND CH4 ON THE STRUCTURE OF THIN SILVER FILMS INVESTIGATED BY ULTRAHIGH-VACUUM INTERNAL-STRESS MEASUREMENTS [J].
KOCH, R ;
LEONHARD, H ;
ABERMANN, R .
THIN SOLID FILMS, 1982, 89 (02) :117-123