EPITAXIAL-GROWTH MECHANISM OF DIAMOND CRYSTAL IN CH4-H2 PLASMA

被引:232
作者
TSUDA, M
NAKAJIMA, M
OIKAWA, S
机构
关键词
D O I
10.1021/ja00279a019
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:5780 / 5783
页数:4
相关论文
共 24 条
[1]  
ATKINS PW, 1982, PHYSICAL CHEM, P194
[2]   GROUND-STATES OF MOLECULES .25. MINDO-3 - IMPROVED VERSION OF MINDO SEMIEMPIRICAL SCF-MO METHOD [J].
BINGHAM, RC ;
DEWAR, MJS ;
LO, DH .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1975, 97 (06) :1285-1293
[3]  
Doi A., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1137
[4]  
FEDOSEEV DV, 1984, ZH FIZ KHIM+, V58, P2365
[5]   A FORMULATION OF REACTION COORDINATE [J].
FUKUI, K .
JOURNAL OF PHYSICAL CHEMISTRY, 1970, 74 (23) :4161-&
[6]   CONSTITUENT ANALYSIS OF POTENTIAL GRADIENT ALONG A REACTION COORDINATE - METHOD AND AN APPLICATION TO CH4 + T REACTION [J].
FUKUI, K ;
KATO, S ;
FUJIMOTO, H .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1975, 97 (01) :1-7
[7]  
GORDEEV SK, 1982, DOKL AKAD NAUK SSSR+, V262, P127
[8]  
HAO Z, 1983, P INT ION ENG C, P1143
[9]   INTRINSIC REACTION COORDINATE - AN ABINITIO CALCULATION FOR HNC-]HCN AND H-+CH4-]CH4+H- [J].
ISHIDA, K ;
MOROKUMA, K ;
KOMORNICKI, A .
JOURNAL OF CHEMICAL PHYSICS, 1977, 66 (05) :2153-2156
[10]  
Kijima K., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1417