Micromachined Fabry-Perot cavity pressure transducer

被引：86

作者：

Kim, Y

Neikirk, DP

机构：

[1] Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1995年 / 7卷 / 12期

关键词：

D O I：

10.1109/68.477286

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A surface micromachined Fabry-Perot cavity used as a pressure sensor has been fabricated using standard IC technology, Dielectric film stacks consisting of layers of Silicon dioxide and silicon nitride were used as mirrors, Polysilicon was used as a sacrificial layer that was then removed to form an air gap cavity. The Fabry-Perot,sensor was optically interrogated using a multimode optical fiber, The measured response of the sensor agrees well with theoretical simulation, which takes into account the averaging effect caused by the shape of the deflected mirror in the cavity.

引用

页码：1471 / 1473

页数：3

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