AUTOMATED PHASE-MEASURING PROFILOMETRY - A PHASE MAPPING APPROACH

被引：187

作者：

SRINIVASAN, V ^{[1
]}

LIU, HC ^{[1
]}

HALIOUA, M ^{[1
]}

机构：

[1] NEW YORK INST TECHNOL, NYCOM, OLD WESTBURY, NY 11568 USA

来源：

APPLIED OPTICS | 1985年 / 24卷 / 02期

关键词：

D O I：

10.1364/AO.24.000185

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：185 / 188

页数：4

共 9 条

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[9]

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