SURFACE MICROSTRUCTURES OF ZNO COATED SNO2-F FILMS

被引：39

作者：

IKEDA, T

SATO, K

HAYASHI, Y

WAKAYAMA, Y

ADACHI, K

NISHIMURA, H

机构：

[1] Research Center, Asahi Glass Co., Ltd. 1150, Kanagawa-ku, Yokohama, 221, Hazawa-cho

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1994年 / 34卷 / 1-4期

关键词：

D O I：

10.1016/0927-0248(94)90063-9

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

ZnO films of 100 Angstrom thick were coated on textured SnO2:F films using DC magnetron sputtering to improve hydrogen plasma durability: The surface microstructure and the plasma durability of the films were investigated using a scanning electron microscope (SEM), reflection high energy electron diffraction (RHEED) and optical measurements. It was found that the ZnO coated films exhibited high durability against hydrogen plasma. The well ordered microstructure of ZnO was considered to act as a good barrier against hydrogen diffusion into the SnO2:F films.

引用

页码：379 / 384

页数：6