Determination of optical properties of lead based ferroelectrics thin films for integrated optics applications

被引：7

作者：

Dogheche, E

Jaber, B

Remiens, D

Thierry, B

机构：

[1] Laboratoire des Matériaux Avancés Céramiques, CRITT Céramiques Fines Université de Valenciennes et du Hainaut-Cambrésis

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 29卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00168-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Optical properties of lanthanum doped lead titanate PbLaTiO3-PLT thin films deposited using the R.F. magnetron sputtering technique have been studied. Polycrystalline films were deposited on sapphire substrates. All films exibited a dependance of annealing temperature on the key optical constants. The microstructure of the films and its relation to the optical properties is observed. Optical waveguiding measurements at lambda=633 nm wavelength have been investigated.

引用

页码：315 / 318

页数：4

共 19 条

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