ION IMPACT EFFECT ON CARBON COATINGS STUDIED IN A DOUBLE PLASMA-DEVICE

被引：6

作者：

SUGAI, H

KAKO, H

OKUDA, T

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 23卷 / 04期

关键词：

D O I：

10.1016/0168-583X(87)90485-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：552 / 556

页数：5

共 13 条

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