CHARACTERIZATION OF PB(ZR,TI)O3 THIN-FILMS DEPOSITED FROM MULTI-ELEMENT METAL TARGETS

被引：149

作者：

SREENIVAS, K

SAYER, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.341822

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1484 / 1493

页数：10

共 56 条

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