LASER-INDUCED ETCHING OF MN-ZN FERRITE AND ITS APPLICATION

被引：23

作者：

LU, YF

TAKAI, M

NAGATOMO, S

MINAMISONO, T

NAMBA, S

机构：

[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

[2] DS SCANNER CO LTD,HIGASHI KU,OSAKA 540,JAPAN

[3] OSAKA UNIV,FAC SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期

关键词：

D O I：

10.1143/JJAP.28.2151

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2151 / 2156

页数：6

共 10 条

[1]

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[4]

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[7] ION-IMPLANTATION IN SINGLE-CRYSTAL MAGNETIC FERRITE [J].

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4) :728-731

[8] THERMOCHEMICAL DRY ETCHING OF SINGLE-CRYSTAL FERRITE BY LASER IRRADIATION IN CCL4 GAS ATMOSPHERE [J].

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NAGATOMO, S .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 46 (03) :197-205

[9]

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[10] RAPID DIRECT WRITING OF HIGH-ASPECT-RATIO TRENCHES IN SILICON [J].

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