RANGE PROFILES OF 6-16-KEV HYDROGEN-IONS IMPLANTED IN METAL-OXIDES

被引：13

作者：

BOTTIGER, J ^{[1
]}

LESLIE, JR ^{[1
]}

RUD, N ^{[1
]}

机构：

[1] UNIV AARHUS,INST PHYS,DK-8000 AARHUS C,DENMARK

来源：

JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 04期

关键词：

D O I：

10.1063/1.322791

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1672 / 1675

页数：4

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