DETERMINATION OF THICKNESS ERRORS AND BOUNDARY ROUGHNESS FROM THE MEASURED PERFORMANCE OF A MULTILAYER COATING

被引：76

作者：

SPILLER, E

ROSENBLUTH, AE

机构：

来源：

关键词：

D O I：

10.1117/12.7973935

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：954 / 963

页数：10

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