MODELING AND OPTIMIZATION OF MICROMACHINED SILICON RESONATORS

被引：25

作者：

BEEBY, SP ^{[1
]}

TUDOR, MJ ^{[1
]}

机构：

[1] ERA TECHNOL LTD,CTR MICROENGN,LEATHERHEAD KT22 7SA,SURREY,ENGLAND

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 02期

关键词：

D O I：

10.1088/0960-1317/5/2/011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A vital requirement for a resonator-based sensor is a high degree of balance in the resonator's chosen mode of vibration. A systematic study of the balance and stress sensitivity of a number of important resonator geometries has been performed. New methods have been developed both to evaluate and optimize the balance of a resonator structure. This paper presents the results of the study, details the methods used and provides some simple design rules for resonators. All the geometries evaluated are realizable as microsensors using silicon micromachining techniques.

引用

页码：103 / 105

页数：3