COMMENT ON THE TANGENT RULE

被引:20
作者
FUJIWARA, H
HARA, K
KAMIYA, M
HASHIMOTO, T
OKAMOTO, K
机构
[1] KUMAMOTO UNIV,FAC GEN EDUC,KUMAMOTO 860,JAPAN
[2] TOTTORI UNIV,DEPT EDUC,TOTTORI 680,JAPAN
[3] CHIBA UNIV,COLL ARTS & SCI,CHIBA 260,JAPAN
关键词
Metallography - Grain Growth - Microscopic Examination;
D O I
10.1016/0040-6090(88)90453-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
On the basis of our accumulated data for iron films, experimental comment on the tangent rule, which is a functional relation between the incidence angle αI of obliquely deposited films and the inclination angle αc, of columns, is presented. The αc strongly depends on the deposition parameters, such as substrate temperature Ts, deposition rate R, or the vapour beam density Rv and pressure ρ during deposition. The ranges of parameters where the tangent rule is obeyed are very narrow and very limited.
引用
收藏
页码:387 / 391
页数:5
相关论文
共 11 条
[1]  
BANGJUN L, 1985, P SOC PHOTO-OPT INST, V540, P150, DOI 10.1117/12.976106
[2]  
Fujiwara H., 1987, Proceedings of the International Symposium on Physics of Magnetic Materials, P97
[3]   COLUMNAR GROWTH IN EVAPORATED IRON FILMS [J].
FUJIWARA, H ;
HARA, K ;
KAMIYA, M ;
HASHIMOTO, T ;
OKAMOTO, K .
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1983, 35 (1-3) :296-298
[4]   ORIGIN OF ANOMALOUS MAGNETIC ANISOTROPY OF IRON FILMS EVAPORATED AT OBLIQUE INCIDENCE [J].
HARA, K ;
HASHIMOT.T ;
TATSUMOT.E .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1970, 28 (01) :254-&
[5]  
HARA K, IN PRESS
[6]   COLUMNAR STRUCTURE AND TEXTURE OF IRON FILMS EVAPORATED AT OBLIQUE-INCIDENCE [J].
HASHIMOTO, T ;
OKAMOTO, K ;
HARA, K ;
KAMIYA, M ;
FUJIWARA, H .
THIN SOLID FILMS, 1982, 91 (02) :145-154
[7]  
LEAMY HJ, 1980, CURRENT TOPICS MATER, V6
[8]   MODEL FOR COLUMNAR MICROSTRUCTURE OF THIN SOLID FILMS [J].
LICHTER, S ;
CHEN, J .
PHYSICAL REVIEW LETTERS, 1986, 56 (13) :1396-1399
[9]  
NIEUWENHUIZEN JM, 1966, PHILIPS TECH REV, V27, P87
[10]   COLUMNAR STRUCTURE AND TEXTURE OF IRON FILMS PREPARED AT VARIOUS EVAPORATION RATES [J].
OKAMOTO, K ;
HASHIMOTO, T ;
HARA, K ;
KAMIYA, M ;
FUJIWARA, H .
THIN SOLID FILMS, 1987, 147 (03) :299-311