DESIGN CONSIDERATIONS FOR THE X-RAY-LITHOGRAPHY STATION AT THE STANFORD SYNCHROTRON RADIATION LABORATORY

被引：6

作者：

PIANETTA, P

TATCHYN, R

JAEGER, R

BARBEE, TW

机构：

[1] HEWLETT PACKARD LABS,PALO ALTO,CA 94305

[2] STANFORD UNIV,DEPT MAT SCI,STANFORD,CA 94304

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1984年 / 222卷 / 1-2期

关键词：

D O I：

10.1016/0167-5087(84)90558-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：355 / 358

页数：4

共 13 条

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BARTLETT, RJ ;

KANIA, DR ;

DAY, RH ;

KALLNE, E .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 222 (1-2) :95-98

[3]

DAY RH, 1981, LA7941MSUC21 LOS AL

[4]

Grobman W. D., 1983, Handbook on synchrotron radiation, P1131

[5]

HENKE BL, 1982, ATOM DATA NUCL DATA, V27, P22

[6]

LEPSELTER MP, 1980, DEC IEDM, P42

[7]

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[8]

Neureuther A. R., 1980, Synchrotron radiation research, P223

[9]

SILVERMAN JP, 1983, UNPUB P SPIE SUBMICR

[10] NEW MONOCHROMATOR DESIGNS FOR THE SOFT-X-RAY RANGE [J].

TATCHYN, R ;

LINDAU, I .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 195 (1-2) :163-173

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