EFFECTS OF NONRADIATIVE DEEXCITATION OF EXCITED SPUTTERED ATOMS NEAR SILICON AND SILICON DIOXIDE SURFACES

被引：61

作者：

WHITE, CW ^{[1
]}

SIMMS, DI ^{[1
]}

TOLK, NH ^{[1
]}

MCCAUGHAN, DV ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0039-6028(75)90378-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：657 / 663

页数：7

共 17 条

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VANDERWEG, WF ;

BIERMAN, DJ .

PHYSICA, 1969, 44 (02) :206-+

[14]

VANDERWEG WF, 1973, 5TH INT C AT COLL SO

[15] OPTICAL RADIATION FROM LOW-ENERGY ION-SURFACE COLLISIONS [J].

WHITE, CW ;

TOLK, NH .

WHITE, CW ;

SIMMS, DL ;

TOLK, NH .

[17]

WHITE CW, 1974, CHARACTERIZATION SOL, pCH23