PATTERNING A 50-NM PERIOD GRATING USING SOFT-X-RAY SPATIAL-FREQUENCY MULTIPLICATION

被引：26

作者：

WEI, M ^{[1
]}

ATTWOOD, DT ^{[1
]}

GUSTAFSON, TK ^{[1
]}

ANDERSON, EH ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587632

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3648 / 3652

页数：5

共 18 条

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