A NEW TECHNIQUE FOR THE FORMATION OF ULTRAFINE PARTICLES BY SPUTTERING

被引:28
作者
YATSUYA, S [1 ]
KAMAKURA, T [1 ]
YAMAUCHI, K [1 ]
MIHAMA, K [1 ]
机构
[1] NAGOYA UNIV,DEPT APPL PHYS,FURO CHO,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1986年 / 25卷 / 01期
关键词
D O I
10.1143/JJAP.25.L42
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L42 / L44
页数:3
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