NONTRADITIONAL TECHNOLOGIES FOR MICROFABRICATION

被引：45

作者：

DARIO, P ^{[1
]}

CARROZZA, MC ^{[1
]}

CROCE, N ^{[1
]}

MONTESI, MC ^{[1
]}

COCCO, M ^{[1
]}

机构：

[1] SCUOLA SUPER SANT ANNA, MITECH LAB, I-56127 PISA, ITALY

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 02期

关键词：

D O I：

10.1088/0960-1317/5/2/003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Although silicon planar technology has generated the field of micromechanics, it has been realized that this technology has intrinsic limitations for the fabrication of truly 3D micromechanisms. A number of alternative technologies based either on silicon or on different materials are presently investigated in order to overcome the limitations of planar silicon technology. This paper outlines the motivations for developing new microfabrication technologies, especially those that are considered as 'non-traditional' in the microelectronics domain, and the perspectives offered by this approach for fabricating miniature, micro and nanodevices. Four representative 'non-traditional' technologies are considered. LIGA process, micro electro-discharge machining (EDM), micro stereo lithography, and the combination of biological and artificial microfabricated structures ('hybrid' technologies).

引用

页码：64 / 71

页数：8

共 27 条

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