TEXTURE DEVELOPMENT IN POLYCRYSTALLINE THIN-FILMS

被引:287
作者
THOMPSON, CV
CAREL, R
机构
[1] Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1995年 / 32卷 / 03期
基金
美国国家科学基金会;
关键词
POLYCRYSTALLINE FILMS; TEXTURE; GRAIN ORIENTATIONS; KINETIC PROCESSES;
D O I
10.1016/0921-5107(95)03011-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The distribution of crystallographic orientations of the grains in a polycrystalline film can evolve through a number of kinetic processes. Orientation evolution can occur before, during and after coalescence of islands to form a continuous film, during thickening of a film, and during post-deposition annealing. The energetic constraints leading to texture selection include surface and interface energy minimization, as well as strain-energy minimization. The final texture of a film depends on which texture-selection mechanisms and driving forces dominate, and is different for different films, substrates, and deposition conditions.
引用
收藏
页码:211 / 219
页数:9
相关论文
共 45 条
[1]   ISLAND GROWTH AND COARSENING IN THIN-FILMS - CONSERVATIVE AND NONCONSERVATIVE SYSTEMS [J].
ATWATER, HA ;
YANG, CM .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (10) :6202-6213
[2]  
AUST KT, 1959, T AM I MIN MET ENG, V215, P820
[3]  
AUST KT, 1959, T AIME, V215, P215
[4]   CORRELATIONS FOR DIFFUSION CONSTANTS [J].
BROWN, AM ;
ASHBY, MF .
ACTA METALLURGICA, 1980, 28 (08) :1085-1101
[5]  
CAREL R, 1994, MATER RES SOC SYMP P, V343, P49, DOI 10.1557/PROC-343-49
[7]  
CHAUDHARI P, 1969, IBM J RES DEV MAR, P197
[8]  
CHRISTIAN JW, 1975, THEORY TRANSFORMATIO, pCH10
[9]  
DAMMERS AJ, 1992, MATER SCI FORUM, V94, P345, DOI 10.4028/www.scientific.net/MSF.94-96.345
[10]   NUMERICAL-ANALYSIS OF INTERFACE ENERGY-DRIVEN COARSENING IN THIN-FILMS AND ITS CONNECTION TO GRAIN-GROWTH [J].
FLORO, JA ;
THOMPSON, CV .
ACTA METALLURGICA ET MATERIALIA, 1993, 41 (04) :1137-1147