BEAM-FOIL STUDY OF TITANIUM IN THE EUV USING FOILS OF DIFFERENT MATERIALS

被引:24
作者
BASHKIN, S
TRABERT, E
HECKMANN, PH
VONBUTTLAR, H
BRAND, K
机构
[1] RUHR UNIV BOCHUM,D-4630 BOCHUM 1,FED REP GER
[2] RUHR UNIV BOCHUM,DYNAMITRON TANDEM LAB,D-4630 BOCHUM,FED REP GER
关键词
D O I
10.1088/0031-8949/28/2/009
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:193 / 200
页数:8
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