MICROSTRUCTURE AND TEXTURE FORMATION IN VACUUM-DEPOSITED SILVER FILMS

被引:3
作者
GRANTCHAROVA, E
DOBREV, D
机构
[1] Institute of Physical Chemistry, Bulgarian Academy of Sciences, Sofia, 1040
关键词
D O I
10.1002/crat.2170280621
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The role of the recrystallization in the processes of microstructure and texture formation of silver films is compared for films: 1) deposited at high substrate temperatures (up to 720 K) and slowly cooled or quenched to room temperature; 2) deposited at room temperature and annealed at high temperatures. The grain growth distribution curves and the texture perfection are analysed. It is shown that the recrystallization processes taking place both during the slow cooling and during the annealing of the films lead to a formation of identical film structure with lower degree of texture perfection than in the case of quenched films.
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页码:877 / 880
页数:4
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