NONSPECULAR X-RAY-SCATTERING FROM MULTILAYER STRUCTURES

被引：88

作者：

KORTRIGHT, JB

机构：

[1] Center for X-ray Optics, Lawrence Berkeley Laboratory, University of California, Berkeley

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 07期

关键词：

D O I：

10.1063/1.349259

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nonspecular x-ray (lambda = 0.154 nm) scattering from a 3.9-nm-period tungsten/carbon multilayer structure with scattering vectors near low-angle multilayer specular interference peaks is reported. Diffuse intensity results from kinematical small-angle scattering from in-plane structural inhomogeneities associated with the individual interfaces or layers having characteristic length scales much greater than the multilayer period. Modulations in this diffuse nonspecular intensity when the incident or observation angle is equal to the angle of the first-order multilayer Bragg peak result from standing-wave-enhanced scattering and other dynamical effects. The technique provides a sensitive measure of in-plane structural inhomogeneities of heterointerface systems.

引用

页码：3620 / 3625

页数：6

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