APPLICATIONS OF SIMS, SAES AND XPS TO PROBLEMS IN THE SEMICONDUCTOR INDUSTRY

被引：9

作者：

ALNOT, P

HUBER, AM

OLIVIER, J

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1986年 / 9卷 / 1-6期

关键词：

D O I：

10.1002/sia.740090504

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：283 / 291

页数：9

共 40 条

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