BEAM DAMAGE OF SELF-ASSEMBLED MONOLAYERS

被引:56
作者
RIEKE, PC
BAER, DR
FRYXELL, GE
ENGELHARD, MH
PORTER, MS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 04期
关键词
D O I
10.1116/1.578364
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
X-ray and electron beam damage studies were performed on Br-terminated and methyl-terminated alkylsilane self-assembled monolayers. X-ray beam initiated damage was primarily limited to removal of the labile Br group and did not significantly damage the hydrocarbon chain. Some of the x-ray beam damage could be attributed to low-energy electrons emitted by the non-monochromatic source, but further damage was attributed to secondary electrons produced in the sample by x-ray exposure. Electron beams caused significant damage to the hydrocarbon chains. Maximum damage occurred with a beam energy of 600 eV and a dosage of 6 X 10(-3) C/cm2.
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页码:2292 / 2297
页数:6
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