PROPERTIES AND ANODIZATION OF EVAPORATED ALUMINUM FILMS STUDIED BY ELLIPSOMETRY

被引:27
作者
DELLOCA, CJ [1 ]
机构
[1] FAIRCHILD SEMICONDUCTOR,MT VIEW,CA 94043
关键词
D O I
10.1016/0040-6090(75)90151-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:371 / 380
页数:10
相关论文
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