THERMAL-OXIDATION AND ANODIC FILM SUBSTRATE REACTIONS ON INXGA1-XASYP1-Y

被引：2

作者：

SCHWARTZ, GP

DUTT, BV

MALYJ, M

GRIFFITHS, JE

GUALTIERI, GJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.582497

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：254 / 259

页数：6

共 17 条

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[10] OXIDE-SUBSTRATE AND OXIDE-OXIDE CHEMICAL-REACTIONS IN THERMALLY ANNEALED ANODIC FILMS ON GASB, GAAS, AND GAP [J].

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