PROPERTIES OF TRANSPARENT ZINC-STANNATE CONDUCTING FILMS PREPARED BY RADIO-FREQUENCY MAGNETRON SPUTTERING

被引：132

作者：

MINAMI, T

TAKATA, S

SATO, H

SONOHARA, H

机构：

[1] Electron Device System Laboratory, Kanazawa Institute of Technology, Nonoichi, Ishikawa 921

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579592

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Highly transparent and conductive amorphous zinc-stannate thin films were prepared by rf magnetron sputtering using a target with a Zn/(Zn+Sn) content of 33 at. %. The resistivity distribution of the zinc-stannate films having a composition near ZnSn03 and deposited on the surface of substrates placed parallel to the target surfacewas successfully controlled by optimizing both the sputter gas pressure and oxygen partial pressure. A uniform distribution with a resistivity of 4–5 X10 3 Ω cm and an average transmittance above 80% in the visible range was obtained for undoped zinc-stannate films deposited on substrates from room temperature to 300 °C. The zinc-stannate films were found to be thermally and chemically more stable than undoped SnO2 and ZnO films. © 1995, American Vacuum Society. All rights reserved.

引用

页码：1095 / 1099

页数：5

共 20 条

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