PHOTOLITHOGRAPHIC FABRICATION METHOD OF COMPUTER-GENERATED HOLOGRAPHIC INTERFEROGRAMS

被引：7

作者：

KAJANTO, M

BYCKLING, E

FAGERHOLM, J

HEIKONEN, J

TURUNEN, J

VASARA, A

SALIN, A

机构：

[1] TECH RES CTR FINLAND,SEMICOND LAB,SF-02150 ESPOO,FINLAND

[2] HELSINKI UNIV TECHNOL,DEPT TECH PHYS,SF-02150 ESPOO,FINLAND

来源：

APPLIED OPTICS | 1989年 / 28卷 / 04期

关键词：

D O I：

10.1364/AO.28.000778

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：778 / 784

页数：7

共 19 条

[1] ELECTRON-BEAM FABRICATION OF COMPUTER-GENERATED HOLOGRAMS [J].

ARNOLD, SM .

OPTICAL ENGINEERING, 1985, 24 (05) :803-807

[2]

Buczek H., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V884, P46, DOI 10.1117/12.944159

[3]

BURGGRAAF P, 1988, FEB SEM INT, V11, P44

[4] COMPUTER GENERATED HOLOGRAMS IN PATTERN-RECOGNITION - A REVIEW [J].

CASASENT, D .

OPTICAL ENGINEERING, 1985, 24 (05) :724-730

[5]

Cederquist J. N., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V884, P40, DOI 10.1117/12.944158

[6] QUANTIZATION EFFECTS ON THE FIELDS OF ELECTRON-BEAM GENERATED CYLINDRICAL ZONE PLATES [J].

CHEN, CL ;

OSBORNE, TR .

APPLIED OPTICS, 1987, 26 (12) :2342-2347

[7] COHERENT OPTICAL GENERATION AND INSPECTION OF 2-DIMENSIONAL PERIODIC STRUCTURES [J].

DAMMANN, H ;

KLOTZ, E .

OPTICA ACTA, 1977, 24 (04) :505-515

[8]

Fagerholm J., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V883, P20, DOI 10.1117/12.944121

[9] COMPUTER GENERATED HOLOGRAPHIC OPTICAL-ELEMENTS FOR OPTICAL INTERCONNECTION OF VERY LARGE-SCALE INTEGRATED-CIRCUITS [J].

FELDMAN, MR ;

GUEST, CC .

APPLIED OPTICS, 1987, 26 (20) :4377-4384

[10]

Goodman J. W, 2005, INTRO FOURIER OPTICS

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