CHARACTERIZATION OF CVD DIAMOND FILMS BY NUCLEAR TECHNIQUES WITH ALPHA-PARTICLES

被引:4
作者
MANFREDOTTI, C [1 ]
FIZZOTTI, F [1 ]
BOERO, M [1 ]
VITTONE, E [1 ]
POLESELLO, P [1 ]
机构
[1] NATL INST NUCL PHYS,SEZ TURIN,TURIN,ITALY
关键词
POLYCRYSTALLINE DIAMOND FILMS; CHARACTERIZATION; MICROSTRUCTURAL CHARACTERIZATION; GROWTH MORPHOLOGY;
D O I
10.1016/0925-9635(94)05285-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Alpha particles were used for the first time to characterize the transport properties of polycrystalline CVD diamond films. The advantages with respect to other techniques which make use of beta particles or light are that it is easier to discriminate between holes and electrons, and localization of deposited energy is more precise because alpha particles do not suffer from energy loss fluctuations and straggling. The results indicate that, on average, the transport properties of electrons and holes in CVD diamond are roughly the same and that lifetimes are in the range 0.3-1 ns. The broad distribution of collected energies is indicative of strong inhomogeneities in the transport of electrons and holes which are assumed to be related to the presence of crystalline grains of different dimensions. The values quoted in the literature for average carrier collection lengths, and obtained using minimum ionizing particles, are likely to be ascribed to charge transport in grains of dimensions in the range 10-100 mu m.
引用
收藏
页码:517 / 519
页数:3
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