SPUTTERING OF CONDENSED NOBLE-GASES BY KEV HEAVY-IONS

被引：50

作者：

HARING, RA

PEDRYS, R

HARING, A

DEVRIES, AE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 4卷 / 01期

关键词：

D O I：

10.1016/0168-583X(84)90041-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：40 / 54

页数：15

共 47 条

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