SYNTHESIS OF THIN-FILMS BY ATMOSPHERIC-PRESSURE CHEMICAL VAPOR-DEPOSITION USING AMIDO AND IMIDO TITANIUM(IV) COMPOUNDS AS PRECURSORS

被引:201
作者
FIX, RM [1 ]
GORDON, RG [1 ]
HOFFMAN, DM [1 ]
机构
[1] HARVARD UNIV,DEPT CHEM,12 OXFORD ST,CAMBRIDGE,MA 02138
关键词
D O I
10.1021/cm00009a010
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In an attempt to prepare TiN, the amido- and imidotitanium(IV) complexes Ti(NR2)4 (R = Me or Et), Ti(NMe2)3(t-Bu), and [Ti(μ-N-t-Bu)(NMe2)2]2 were used as precursors in an atmospheric pressure chemical vapor deposition process. Depositions on glass, silicon, vitreous carbon, and boron substrates were successfully carried out at temperatures below 450 °C to give coatings up to 6000 Å thick and growth rates from 50 to 1000 Å/min. The films, which were characterized by electron microprobe and Rutherford backscattering, contained titanium and nitrogen in a ratio close to 1, plus significant amounts of carbon and oxygen. X-ray photoelectron analyses with depth profiling confirmed that the films are uniform in composition, the nitrogen is Ti bound, and the carbon is both Ti bound and organic. The analyses indicate precursor decomposition mechanisms involving both Ti-NR2 homolytic bond cleavage and amido ligand β-hydride activation, the latter accounting for the presence of Ti-bound carbon in the films. In support of this hypothesis, films made from precursors with cyclic amido ligands, for which β-hydride activation is disfavored, contained only organic carbon. © 1990, American Chemical Society. All rights reserved.
引用
收藏
页码:235 / 241
页数:7
相关论文
共 20 条
[1]   METALLO-ORGANIC COMPOUNDS CONTAINING METAL-NITROGEN BONDS .1. SOME DIALKYLAMINO-DERIVATIVES OF TITANIUM AND ZIRCONIUM [J].
BRADLEY, DC ;
THOMAS, IM .
JOURNAL OF THE CHEMICAL SOCIETY, 1960, (OCT) :3857-3861
[2]   METALLO-ORGANIC COMPOUNDS CONTAINING METAL-NITROGEN BONDS .4. SOME BIS-(PRIMARY AMINO)-TITANIUM COMPOUNDS [J].
BRADLEY, DC ;
TORRIBLE, EG .
CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1963, 41 (01) :134-&
[3]   METALLO-ORGANIC COMPOUNDS CONTAINING METAL-NITROGEN BONDS .3. DIALKYLAMINO COMPOUNDS OF TANTALUM [J].
BRADLEY, DC ;
THOMAS, IM .
CANADIAN JOURNAL OF CHEMISTRY-REVUE CANADIENNE DE CHIMIE, 1962, 40 (07) :1355-&
[4]   TITANIUM-NITROGEN COMPOUNDS .7. IR, RAMAN AND 1H-NMR SPECTRA OF TRIS(DIALKYLAMINO)TITANIUM-ALKYLENE [J].
BURGER, H ;
NEESE, HJ .
JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1969, 20 (01) :129-&
[5]  
BURGER H, 1970, J ORGANOMET CHEM, V21, P381
[6]  
COLLMAN JP, 1987, PRINCIPLES APPLICATI
[7]  
FIX RM, IN PRESS MATER RES S
[8]  
GIROLAMI GS, 1988, MATER RES SOC S P, V121, P429
[9]   CHEMICAL VAPOR-DEPOSITION OF TITANIUM NITRIDE AT LOW-TEMPERATURES [J].
KURTZ, SR ;
GORDON, RG .
THIN SOLID FILMS, 1986, 140 (02) :277-290
[10]   ANALYSIS OF ANGULAR DISTRIBUTIONS IN THE REACTION B-11(ALPHA,P) C-14 [J].
LEE, LL ;
SCHIFFER, JP .
PHYSICAL REVIEW, 1959, 115 (01) :160-165