NON-MASS-ANALYZED ION-IMPLANTATION FROM A SOLID PHOSPHORUS SOURCE

被引：8

作者：

SPITZER, MB

BUNKER, SN

机构：

来源：

关键词：

D O I：

10.1063/1.92973

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：976 / 978

页数：3

共 6 条

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Kirkpatrick A. R., 1980, Fourteenth IEEE Photovoltaic Specialists Conference 1980, P820

[5]

Sirkis M. D., 1981, Fifteenth IEEE Photovoltaic Specialists Conference - 1981, P981

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TOKUYAMA, T .