NATURE OF PREFERENTIALLY ETCHED SITES ON (100) SURFACE OF SILICON-CRYSTALS

被引:4
作者
BORLE, WN [1 ]
BAGAI, RK [1 ]
SHARDA, GD [1 ]
机构
[1] SOLID STATE PHYS LAB,DELHI 110007,INDIA
关键词
D O I
10.1016/0022-0248(76)90276-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:154 / 155
页数:2
相关论文
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[3]   DISLOCATIONS IN THERMALLY STRESSED SILICON WAFERS [J].
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