USE OF ELECTRIC PROBES IN SILANE RADIO-FREQUENCY DISCHARGES

被引：42

作者：

MOSBURG, ER ^{[1
]}

KERNS, RC ^{[1
]}

ABELSON, JR ^{[1
]}

机构：

[1] SOLAR ENERGY RES INST, GOLDEN, CO 80401 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 09期

关键词：

D O I：

10.1063/1.332758

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4916 / 4927

页数：12

共 38 条

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