LASER-INDUCED PLASMA FORMATION DURING PULSED-LASER DEPOSITION

被引:63
作者
ADEN, M
KREUTZ, EW
VOSS, A
机构
[1] Lehrstuhl für Lasertechnik, RWTH Aachen, Aachen, W-5100
关键词
D O I
10.1088/0022-3727/26/10/002
中图分类号
O59 [应用物理学];
学科分类号
摘要
The ablation of Al2O3 by CO2 laser radiation is investigated both theoretically and experimentally. The model connects the laser-induced phase transition from condensed to vaporized state of the target and the dynamic of the emerging process plasma. The plasma is described in a two-fluid approximation by use of non-dissipative gas-dynamical equations incorporating absorption of laser radiation in the plasma and the dynamic of its ionization state. In the experimental part, the geometry of the luminous process plasma above the target at different instances is detected and the weight loss of the target as a function of the fluence is measured. At an Ar-base pressure below 1 mbar, both calculated and measured results reveal that there exist two zones in the process plasma: one which is directly attached to the target surface throughout the whole process, and another which is recognized as an outward moving shock front. Further, it is seen from both approaches that, due to absorption of laser radiation by the plasma, the weight loss has a local maximum.
引用
收藏
页码:1545 / 1553
页数:9
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