QUANTITATIVE REACTION DESORPTION APPLIED TO CARBON NEAR A MO(100) SURFACE

被引:25
作者
SCHOBERL, T
机构
[1] Erich Schmid-Institut fur Festkorperphysik der Osterreichischen Akademie der Wissenschaften, A 8700 Leoben
基金
奥地利科学基金会;
关键词
D O I
10.1016/0039-6028(94)00833-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A reaction desorption study of a carburized Mo(100) surface combined with AES and a reliable method to quantify desorbed species is shown to give information about depth distributions of carbon near Mo surfaces. By these investigations the influence of heat treatments on the carbon distribution in subsurface layers is demonstrated. The subsurface region can absorb much more carbon than the bare surface, therefore acting as an additional reservoir for C atoms. Moreover the carburization of the subsurface layers causes a slowed C-diffusion due to carbide formation within this region. It turns out that the experimental results up to temperatures of 1183 K cannot be explained by the ''classical'' diffusion of C atoms into the bulk. These experimental results are supported by the results of simple computer calculations.
引用
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页码:285 / 292
页数:8
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